Two Stages High Rate Reactive Sputtering, Divided Sputter Process and Oxidation Process.
نویسندگان
چکیده
منابع مشابه
Control of the Reactive Sputtering Process Using Two Reactive Gases
Reactive sputtering when two reactive gases are used presents special problems. Both reactive gases affect the plasma conditions, which means that both affect common feedback control signals such as the cathode voltage and optical emission signals. Two reactive gases require that unique signals for each reactive gas be acquired and that control of each of the reactive gases is done separately. ...
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ژورنال
عنوان ژورنال: The Review of Laser Engineering
سال: 1996
ISSN: 0387-0200,1349-6603
DOI: 10.2184/lsj.24.88